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Focus Scanner Product List

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[P-725.xCDE2 Focus Scanner for Semiconductor Inspection]

High-precision Z-focus scanner for semiconductor inspection equipment with sub-nanometer resolution and maximum 800 µm stroke capability.

In semiconductor inspection equipment, high-resolution Z-axis position control and rapid step motion are required for detecting fine defects and evaluating 3D focus. The P-725.xCDE2 PIFOC focus scanner is a high-precision actuator that achieves sub-nanometer resolution with a maximum focus range of 800 µm. By combining the PICMA piezo actuator with a flexure guide mechanism that incorporates capacitive sensors, high linearity, reproducibility, and stability are realized. This enables high-precision control of Z focus and high-speed scanning in semiconductor inspection, contributing to improved accuracy in the inspection process and enhanced throughput of the equipment. [Application Scenarios] - Z focus control for wafer surface defect inspection - High-resolution imaging in chip and package inspection - High-speed Z scanning in optical and laser-based inspection equipment - Defect analysis using optical inspection and confocal optical microscopy [Benefits of Implementation] - Improved measurement accuracy through high-precision focus control - Enhanced inspection throughput due to rapid Z step motion - Increased reliability of the equipment with stable long-term operation

  • csm_P-725.8CDE2.jpg_preview300_aee6bffd57.jpg
  • Other machine elements
  • Actuator
  • Piezoelectric Devices
  • Focus Scanner

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Long Stroke Objective Focus for Optical Measurement P-725.xCDE2

Sub-nanometer resolution, compatible with maximum 800 µm stroke, high-speed and high-precision PIFOC focus scanner.

In the field of optical measurement, the focus accuracy and stability of the detection position are directly linked to the precision of the results in optical imaging and precise measurement. Applications that require evaluation of fine structures or high-speed data acquisition demand high-resolution focus control and responsive operational performance. The P-725.xCDE2 PIFOC focus scanner achieves sub-nanometer resolution position control with a maximum stroke of 800 µm. Equipped with PICMA piezo actuators and high-precision capacitive sensors in a flexure guide mechanism, it provides high linearity and reproducibility in Z-direction focus adjustment for optical measurement devices. This helps to minimize the impact of focus position shifts in optical measurements, contributing to improved measurement accuracy and device yield. 【Use Cases】 - High-precision measurements with confocal microscopy - High-speed Z-scanning in multiphoton microscopy - High-resolution imaging evaluation devices - Optical interferometers and phase measurement devices 【Benefits of Implementation】 - Sub-nanometer resolution focus control - Wide measurement range with a maximum stroke of 800 µm - Reduced inspection and measurement time due to high-speed response - Long-term stability through PIFOC/flexure structure

  • P-725_2.jpg
  • Other machine elements
  • Actuator
  • Piezoelectric Devices
  • Focus Scanner

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[P-725.xCDE2 for Biotechnology]

Sub-nanometer resolution, Z-direction maximum stroke of 800 µm, equipped with a flexure mechanism focus scanner.

In the field of biotechnology, precise focus control is essential for high-resolution observation of the fine structures of cells and tissues in microscopic imaging applications. This is particularly true for 3D imaging techniques such as confocal microscopy and multiphoton microscopy, where high resolution and fast responsiveness along the Z-axis (focus direction) directly impact observation accuracy. The P-725.xCDE2 PIFOC Focus Scanner employs a flexure guide mechanism with PICMA piezo actuators and capacitive sensors to achieve precise focus control with sub-nanometer resolution. It also supports a maximum stroke of 800 µm, enabling fast and high-precision scanning over a wide range in the depth direction. These characteristics help reduce observation time while minimizing focus position shifts, ultimately contributing to improved reliability and efficiency of experiments. 【Application Scenes】 - Confocal microscopy - Multiphoton microscopy - 3D imaging - Live cell imaging - High-throughput microscopy screening 【Benefits of Implementation】 - High-precision Z-direction focus control - Expanded range of focus stroke - Improved observation efficiency through fast scanning - Stable imaging quality

  • P-725_2.jpg
  • Other machine elements
  • Actuator
  • Piezoelectric Devices
  • Focus Scanner

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